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Cleanroom Operations
Recommended Practice by Institute of Environmental Sciences and Technology, 09/01/2004

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Description

This RP presents guidelines for maintaining cleanroom integrity at all times, including during routine maintenance, modifications, and equipment replacement. The document provides a basis for preparing standard operating procedures for any cleanroom. It also outlines test procedures for verifying cleanliness of cleanroom apparatus and surfaces.

Product Details

Published:
09/01/2004
ISBN(s):
9781877862977
Number of Pages:
24
File Size:
1 file , 1.1 MB